Kuv pom cov ntawv tshaj tawm no ntev dhau los: cov kws tshawb fawb los ntawm lub teb chaws Yelemees, Nyiv thiab lwm lub tebchaws tau siv sijhawm 5 xyoos thiab siv nyiaj ze li 10 lab yuan los tsim lub pob uas ua los ntawm cov khoom siv zoo silicon-28. Qhov no 1kg ntshiab silicon pob yuav tsum tau Ultra-precision machining, sib tsoo thiab polishing, precision ntsuas (sphericity, roughness thiab zoo), nws tuaj yeem hais tias yog lub pob roundest hauv ntiaj teb.
Cia peb qhia cov txheej txheem ultra-precision polishing.
01 Qhov sib txawv ntawm kev sib tsoo thiab polishing
Sib Tsoo: Siv cov khoom abrasive coated los yog nias rau ntawm lub cuab yeej sib tsoo, qhov saum npoo yog tiav los ntawm cov txheeb ze txav ntawm cov cuab yeej sib tsoo thiab cov khoom ua haujlwm nyob rau hauv ib lub siab. Kev sib tsoo tuaj yeem siv los ua ntau yam khoom siv hlau thiab tsis yog hlau. Cov txheej txheem saum npoo muaj xws li dav hlau, sab hauv thiab sab nrauv cylindrical thiab conical nto, convex thiab concave kheej kheej nto, xov, hniav hniav thiab lwm yam profiles. Kev ua haujlwm raug tuaj yeem ncav cuag IT5 ~ IT1, thiab qhov roughness ntawm qhov chaw tuaj yeem ncav cuag Ra0.63 ~ 0.01μm.
Polishing: Ib txoj kev ua haujlwm uas txo qhov roughness ntawm lub workpiece los ntawm kev siv tshuab, tshuaj lom neeg lossis electrochemical ua kom tau txais qhov ci thiab du nto.
Qhov sib txawv tseem ceeb ntawm ob yog qhov ua tiav ntawm qhov ua tiav los ntawm polishing yog siab dua li kev sib tsoo, thiab cov txheej txheem tshuaj lom neeg lossis electrochemical tuaj yeem siv tau, thaum sib tsoo tsuas yog siv cov txheej txheem siv tshuab, thiab cov hmoov nplej abrasive siv yog coarser dua li siv rau. polishing. Ntawd yog, qhov particle loj loj.
02 Ultra-precision polishing tshuab
Ultra-precision polishing yog tus ntsuj plig ntawm kev lag luam hluav taws xob niaj hnub
Lub hom phiaj ntawm ultra-precision polishing thev naus laus zis hauv kev lag luam hluav taws xob niaj hnub no tsis yog tsuas yog ua kom cov ntaub ntawv sib txawv, tab sis kuj ua kom cov ntaub ntawv ntau txheej, kom cov silicon wafers ntawm ob peb millimeters square tuaj yeem tsim tau kaum tawm txhiab rau VLSI tsim los ntawm ntau lab. transistors. Piv txwv li, lub khoos phis tawj tsim los ntawm tib neeg tau hloov pauv los ntawm kaum tawm tons mus rau ntau pua grams niaj hnub no, uas tsis tuaj yeem pom tau yam tsis muaj qhov tseeb polishing.
Noj wafer manufacturing ua piv txwv, polishing yog lub xeem kauj ruam ntawm tag nrho cov txheej txheem, lub hom phiaj yog los txhim kho cov me me defects tshuav los ntawm cov txheej txheem dhau los ntawm wafer ua kom tau qhov zoo tshaj plaws parallelism. Niaj hnub no cov ntaub ntawv optoelectronic kev lag luam qib yuav tsum muaj ntau thiab ntau qhov kev sib piv cov kev cai rau cov khoom siv optoelectronic substrate xws li sapphire thiab ib leeg siv lead ua silicon, uas tau mus txog qib nanometer. Qhov no txhais tau hais tias cov txheej txheem polishing kuj tau nkag mus rau qib ultra-precision ntawm nanometers.
Cov txheej txheem polishing tseem ceeb npaum li cas hauv kev tsim khoom niaj hnub no, nws daim ntawv thov tuaj yeem piav qhia ncaj qha txog qhov teeb meem, suav nrog kev tsim hluav taws xob sib txuas, khoom siv kho mob, nws pib qhov chaw, cov khoom siv digital, precision pwm thiab aerospace.
Lub tshuab polishing saum toj kawg nkaus tsuas yog ua tiav los ntawm ob peb lub tebchaws xws li Tebchaws Meskas thiab Nyij Pooj
Cov cuab yeej tseem ceeb ntawm lub tshuab polishing yog "sib tsoo disc". Ultra-precision polishing muaj yuav luag nruj nruj ntawm cov khoom muaj pes tsawg leeg thiab kev xav tau ntawm kev sib tsoo disc hauv lub tshuab polishing. Qhov no steel disc synthesized los ntawm cov ntaub ntawv tshwj xeeb yuav tsum tsis tsuas yog ua tau raws li nano-theem precision ntawm kev ua haujlwm tsis siv neeg, tab sis kuj muaj qhov tseeb thermal expansion coefficient.
Thaum lub tshuab polishing khiav ntawm kev kub ceev, yog tias thermal expansion ua rau thermal deformation ntawm kev sib tsoo disc, qhov flatness thiab parallelism ntawm substrate tsis tuaj yeem lav. Thiab qhov no thermal deformation yuam kev uas tsis tuaj yeem tso cai tshwm sim tsis yog ob peb millimeters lossis ob peb microns, tab sis ob peb nanometers.
Tam sim no, cov txheej txheem polishing thoob ntiaj teb sab saum toj xws li Tebchaws Meskas thiab Nyij Pooj tuaj yeem ua tau raws li qhov xav tau polishing ntawm 60-nti substrate raw cov ntaub ntawv (uas yog super-loj). Raws li qhov no, lawv tau paub txog cov thev naus laus zis tseem ceeb ntawm cov txheej txheem polishing ultra-precision polishing thiab khov kho cov tswv yim hauv kev lag luam thoob ntiaj teb. . Qhov tseeb, kev paub txog cov thev naus laus zis no kuj tseem tswj kev txhim kho ntawm kev tsim khoom siv hluav taws xob rau kev lag luam loj.
Tau ntsib nrog cov kev txwv nruj heev, hauv kev ua haujlwm ntawm ultra-precision polishing, kuv lub teb chaws tsuas tuaj yeem tshawb xyuas tus kheej tam sim no.
Dab tsi yog qib ntawm Tuam Tshoj ultra-precision polishing tshuab?
Qhov tseeb, nyob rau hauv lub tshav pob ntawm ultra-precision polishing, Tuam Tshoj tsis yog tsis muaj kev ua tiav.
Xyoo 2011, "Cerium Oxide Microsphere Particle Size Standard Materials and Its Preparation Technology" tsim los ntawm pab pawg Dr. Wang Qi los ntawm National Center for Nanoscale Sciences ntawm Suav Academy ntawm Kev Tshawb Fawb tau yeej thawj qhov khoom plig ntawm Tuam Tshoj Petroleum thiab Tshuaj Kev Lag Luam. Federation's Technology Invention Award, thiab lwm yam nanoscale particle loj txheem cov ntaub ntawv Tau txais daim ntawv tso cai ntsuas lub teb chaws thiab daim ntawv pov thawj lub teb chaws thawj-chav txheej txheem cov ntaub ntawv pov thawj. Ultra-precision polishing ntau lawm kuaj cov txiaj ntsig ntawm cov khoom siv cerium oxide tshiab tau dhau los ntawm cov khoom siv txawv teb chaws hauv ib qho kev poob qis, sau qhov sib txawv hauv daim teb no.
Tab sis Dr. Wang Qi tau hais tias: “Qhov no tsis tau txhais hais tias peb tau nce mus rau saum daim teb no. Rau tag nrho cov txheej txheem, tsuas yog polishing kua tab sis tsis muaj ultra-precision polishing tshuab. Feem ntau, peb tsuas yog muag cov khoom siv xwb. "
Xyoo 2019, pab pawg tshawb fawb ntawm Xib Fwb Yuan Julong ntawm Zhejiang University of Technology tau tsim cov khoom siv hluav taws xob semi-taw abrasive chemical mechanical processing technology. Cov tshuab polishing tsim tau tsim los ntawm Yuhuan CNC Machine Tool Co., Ltd., thiab tau txheeb xyuas tias yog iPhone4 thiab iPad3 iav los ntawm Apple. Lub ntiaj teb tsuas yog precision polishing khoom rau vaj huam sib luag thiab aluminium alloy backplane polishing, ntau tshaj 1,700 polishing tshuab yog siv rau loj zus tau tej cov kua iPhone thiab iPad iav daim hlau.
Lub ntxim nyiam ntawm mechanical processing nyob rau hauv no. Txhawm rau nrhiav kev lag luam sib faib thiab cov nyiaj tau los, koj yuav tsum sim koj qhov zoo tshaj plaws kom ncav cuag lwm tus, thiab tus thawj coj thev naus laus zis yuav ib txwm txhim kho thiab txhim kho, ua kom zoo dua qub, kom tsis tu ncua sib tw thiab ntes tau, thiab txhawb kev loj hlob ntawm kev lag luam. tib neeg technology.
Post lub sij hawm: Mar-08-2023
